¡á ¿ëµµ(Applications) * High Precision spin coating systems (spin coater) * Most Compact spin coater, High & controllable speed. (Most control unit for the local maintenance & A/S very easy) * Our spin coater, Simple step programming, High accuracy, Speed R.P.M is Up & down free, * The operation is very easy & powerful quick break in High R.P.M as that strong motor in our spin coater for various application. (Top series) * International Competitive price, 100 steps and 100 recipes stored.
¡áƯ ¡ (Features ) 1. Our spin coater, You can speed up and down freely 0 ~ 50 to 8,000 R.P.M. (Option: 10,000 R.P.M) 2. The auto encoding function in this spin-coater guarantees you strong power and precision. (applied and developed for the first time in history and exported all over the world in a great success.) The encoding function in this spin-coater minimizes the chance of being out of order and makes A/S convenient. (The compact of inner and outer devices realized) 3. Adopted a motor which overcomes the speed limit of existing motors and gain a strong power and speed capacity of max 10,000 r.p.m. 4. Specialized enough to cover even a 18-inch ball and a 12-inch extra-large chuck (Option) 5. Most thinly produced in height, which enables you to use with ease globe box. (Height 220 mm) 6. Spin coater With 100 step and 100 programs (recipes), you can gain the data freely which you want. 7. The programs of the spin controller are made easy enough to be used by beginners. (Digitalized) 8. You can wash and clear balls very easily and conveniently. 9. Compared to foreign products, this spin coater costs a reasonable sum, considering a variety of functions and excellent capacity. 10. Safety device: If chuck and wafer & plate are not positioned in a vacuum, it will stop working. Developed and produced first for the safety of operators. 11. As you see both the initially-set R.P.M and the actual R.P.M numbers, you can check the degree of revolving precision every second. (attained high accuracy) 12. Spin coater Bowl size is big enough for you to be excellent at spin-coating. 13. spin coater Option : Dispenser.
¡á ±Ô°Ý(Specifications)
Specification (Spin Coater: ACE-200) Low price
Wafer size(Max.)
1/2 ~ 4 inch diameter
Bowl size
8" Bowl
Bowl material
SUS or P.P
Special DC Motor
Up & Down free
Step
100
Memory storage
100 program
Rotation Speed
0 to 50 ~ 8,000 rpm
Hold Time
1~999sec
Accuracy
¡¾ 1 R.P.M
acceleration, deceleration free
3,000 R.P.M/sec
Graphic Fuction
Real time for steps Graphic representation
Power Input
AC 110V, 220V, 50/60Hz
Vacuum Input
-450~-650mmHg (6mm ID / 8mm OD)
Display
LCD (Back Light)
System Controller
MCU (Digital Microprocess)
Dimension (W X D X H)
320 X 420 X 220 mm
The above spin coater is Glove Box Type to best spin coater
Specification (Spin Coater: TOP-8)
Wafer size(Max.)
piece to 8 inch diameter
Bowl size
360 mm
Bowl material
SUS or P.P
Special AC Motor
Up & Down free (very strong motor)
Step
100
Memory storage
100 program
Rotation Speed
0 to 50 ~ 6,000 rpm
Hold Time
1~999sec
Accuracy
¡¾ 1 R.P.M under
acceleration, deceleration free
6,000 R.P.M/sec
Graphic Fuction
Real time for steps Graphic representation
Power Input
AC 110V, 220V, 50/60Hz
Vacuum Input
-450~-650mmHg (6mm ID / 8mm OD)
Display
LCD (Back Light)
System Controller
MCU (Digital Microprocess)
Dimension (W X D X H)
The above spincoater is available check to real time Graphic by steps.
Specification (Spin Coater: TOP-4)
Wafer size(Max.)
piece to 4 inch diameter
Bowl size
8 inch
Bowl material
SUS or P.P
Special AC Motor
Up & Down free
Step
100
Memory storage
100 program
Rotation Speed
0 to 50 ~10,000 rpm
Hold Time
1~999sec
Accuracy
¡¾ 1 R.P.M under
acceleration, deceleration free
6,000 R.P.M/sec
Graphic Fuction
Real time for steps Graphic representation
Power Input
AC 110V, 220V, 50/60Hz
Vacuum Input
-450~-650mmHg (6mm ID / 8mm OD)
Display
LCD (Back Light)
System Controller
MCU (Digital Microprocess)
Dimension (W X D X H)
The above spincoater is available check to real time Graphic by steps.
(Spin Coater: TOP-6)
Wafer size(Max.)
6 inch diameter
Bowl size
360 mm
Bowl material
SUS or P.P
Special AC Motor
Up & Down free
Step
100
Memory storage
100 program
Rotation Speed
0 to 50 ~6,000 rpm
Hold Time
1~999sec
Accuracy
¡¾ 1 R.P.M under
acceleration, deceleration free
6,000 R.P.M/sec
Graphic Fuction
Real time for steps Graphic representation
Power Input
AC 110V, 220V, 50/60Hz
Vacuum Input
-450~-650mmHg (6mm ID / 8mm OD)
Display
LCD (Back Light)
System Controller
MCU (Digital Microprocess)
Dimension (W X D X H)
The above spincoater is available check to real time Graphic by steps.